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Coherent COMPex Pro 205 Excimer Laser
KrF,
Wavelength: 248nm, Pulse duration:30ns
Rep
rate:
50Hz, Max pulse energy: 700mJ
Left:
Laser cavity
Right:
Beam delivery system sync with 2-D motion
stage. Homogenization and mask-projection system
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SPI redEnergy G4 Fiber Laser
Wavelength:1064nm,
Pulse duration: 41ns
Max CW Power: 20W, Max Pulse Energy: 0.60mJ
Left: Laser cavity
Right:
Fiber Delivery System
Objective lens processing,
2-D motion stage sync with laser
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ESI Model 3572 Nd:YAG laser
Tunable wavelengths: 1064/355nm,
Pulse duration:
50ns
Max rep rate:
1kHz, Q-switched
Max Power @ 1064nm CW 5.25W
Max Energy @ 355nm pulsed 0.42mJ
Left: Laser cavity
Right:
Beam Delivery System:
Beam expander,
Objective lens processing
2-D motion stage synced with laser
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Spectra-Physics Hurricane System
Ti:Sapphire femtosecond laser
Wavelength: 800nm, Pulse duration:130fs
Rep rate:
1kHz, Max pulse energy: 0.5mJ
Left:
Regenerative
amplifier system
Right"
Beam Delivery System,
40X objective lens processing
Videoing system for focus calibration
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PRC SL-1500 CO2 Laser
Wavelength:10.6μm
Power: 3500W @ CW,
10kW @ Pulsed
Left: Laser
cavity
Right: X-Y Linear
Motion Table,
Beam Delivery System
Lens protection gas |
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Nd:YAG
Wavelength: 1064 nm
Max Rep
Rate: 20 Hz
Pulse
Duration: 17 ns
Max
Pulse Energy: 320 mJ
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GSI Lumonics JK-2000
Nd:YAG Laser
Wavelength:1064nm, Max Power: 2kW
Operating mode: CW/chopped,
Min beam diameter: 0.8mm
Left: Laser
cavity
Right: Fiber beam delivery
system
Synced with Staubli
robotic arm
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Staubli RX-130 Robot
6 DOF
Resolution: 0.1mm
Sync with JK-2000 Nd:YAG laser
Olympus BX-60
Optical Microscopy
Specs: Ref./Tran Mode
Max magnification: 100X
MPlan/UPlan/MplanAPo
lens
Differential
interference contrast(DIC)
Hamamatsu
C8484-05G Digital Camera
Olympus DP10 Color Digital Camera
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ThermoImager TIM 160
Measuring ranges -20 -
100ºC, 0 - 250 ºC, 150 - 900 ºC
Optical resolution 160 x
120 pixels
Spectral range 7.6 - 13μ
Exchangeable lenses
23º,48º
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TORMACH PCNC 1100
Personal CNC Mill
5140RPM 1.5HP R8 Spindle
sensorless vector control
exclusive foldback logic
Carbolite CTF-12/65/550
Tube Furnace
Max Temp: 1200˚C
Max rate: 5 ˚C/min
Vacuuming system
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Additional equipment accessible in the
Materials Research Science and
Engineering Center (MRSEC): |
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Transmission Electron Microscope
Scintag X-Ray Diffractometer (XRD)
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X-Ray Photoelectron
Microscope
(XPS)
Woollam Ellipsometer |
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Fourier Transform Infrared Spectroscope
(FTIR)
Hitachi S-4700 SEM |
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